Microcube interconnection hardware

Details Microcube interconnection hardware Microcube interconnection hardware

1988-05-20

1989-10-10

Noland, Tom

Measuring and testing

Probe or probe mounting

73201, 73756, 374147, 285150, G01D 1130, G01F 1518, G01L 1900, G01K 114

Patent

active

048723550

ABSTRACT:
Three embodiments of MicroCube Interconnection Hardware are disclosed: the MicroVac Vacuum Generator, the MicroControl Module, and the MicroSensor. Each embodiment is a combination of a MicroCube Precision Fitting and Various enhancements which provide precision control, regulation, or measurement of flows of gas or liquid in a semiconductor fabrication environment. The Microcube Precision Fitting is a substantially cubical unitary body that includes a central chamber and at least one external port. Each port comprises an annular counterbored step surrounded by a support wall which both enclose an aperture that extends into the central chamber. The MicroVac Vacuum Generator is a combination of a MicroCube Precision Fitting and three appendages: an inlet, a contaminant port, and an outlet. A first stage fits inside the inlet and is disposed coaxially to a second stage that resides within the outlet.

REFERENCES:
patent: 3901082 (1975-08-01), Lyon
patent: 3926055 (1975-12-01), Garnett
patent: 4037758 (1977-07-01), Bourque
patent: 4216702 (1980-08-01), Brundidge et al.
patent: 4696296 (1987-09-01), Palmer
patent: 4703664 (1987-11-01), Kirkpatrick et al.

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