Microcontact printing

Plastic article or earthenware shaping or treating: apparatus – Female mold and charger to supply fluent stock under... – With means to evacuate mold or provide controlled environment

Reexamination Certificate

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Details

C425S542000, C425S127000, C425S129100, C425S405100, C425S808000, C425SDIG060, C249S117000, C249S141000, C264S259000

Reexamination Certificate

active

07665983

ABSTRACT:
A microcontact printing tool having a print unit including a stamp head with a stamp and a wafer chuck for retaining a substrate. The stamp contained by the stamped head movable relative to the substrate by an actuator and a stage. A plurality of sensors detect the position of the stamp relative to substrate. A method of using the printing tool that includes a real-time feedback for consistent and accurate application of force during the printing of the substrate. The stamp head includes a pressure chamber carrying the stamp. The stamp backing is deflected prior to contact of the stamp with the substrate to form a minimum point and the stamp backing and the stamp is returned to a plane to create a printing propagation contact. An apparatus has a master backing and a stamping backing in close proximity and the stamp material drawn in through a vacuum. The stamp is separated from the master by use of a parting fluid.

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