Microcontact printing

Details Microcontact printing Microcontact printing

2006-10-10

2006-10-10

Chau, Minh (Department: 2854)

Printing

Printing members and inkers

C101S333000, C101S401100

Reexamination Certificate

active

07117790

ABSTRACT:
A microcontact printing tool having a print unit including a stamp head with a stamp and a wafer chuck for retaining a substrate. The stamp contained by the stamped head movable relative to the substrate by an actuator and a stage. A plurality of sensors detect the position of the stamp relative to substrate. A method of using the printing tool that includes a real-time feedback for consistent and accurate application of force during the printing of the substrate. The stamp head includes a pressure chamber carrying the stamp. The stamp backing is deflected prior to contact of the stamp with the substrate to form a minimum point and the stamp backing and the stamp is returned to a plane to create a printing propagation contact. An apparatus and method of producing the stamp on a stamp backing. The apparatus has a master backing and a stamping backing in close proximity and the stamp material drawn in through a vacuum. The stamp is separated from the master by use of a parting fluid.

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