Microconnector and manufacturing method of socket therefor

Electrical connectors – With insulation other than conductor sheath – Plural-contact coupling part

Reexamination Certificate

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Reexamination Certificate

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10541237

ABSTRACT:
A microconnector in which elastic contact force is improved and a manufacturing method of a socket therefore, are provided.The microconnector includes:the socket10in which plural cantilever terminal blocks14having pressure receiving parts16are integrally formed on a board11made of single crystal silicon, and socket leads15are disposed on the terminal blocks14; anda plug20in which plug leads21corresponding to the socket leads15are provided on a plug board23.The manufacturing method of the socket10includes:a step of applying a resist to one surface of the board11;a step of patterning the terminal blocks14by photolithography;a step of performing anisotropic etching to form the terminal blocks14to predetermined heights while a bottom is made to remain;a step of applying a resist to the other surface of the board11;a step of patterning the pressure receiving parts16by photolithography; anda step of performing isotropic etching to remove the bottom.

REFERENCES:
patent: 5378159 (1995-01-01), Renn
patent: 6478627 (2002-11-01), Farnworth et al.
patent: 2003/0203678 (2003-10-01), Farnworth et al.
patent: A 09-69678 (1997-03-01), None
patent: A 11-54175 (1999-02-01), None
patent: A 2001-332344 (2001-11-01), None
patent: A 2002-246117 (2002-08-01), None

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