Microcircuit fine leak test apparatus

Details Microcircuit fine leak test apparatus Microcircuit fine leak test apparatus

1978-05-04

1979-06-26

Yasich, Daniel M.

Measuring and testing

With fluid pressure

Leakage

73 493, G01M 320

Patent

active

041589602

ABSTRACT:
A plurality of fine leak test chambers for fast individual testing of herically plated microelectronic devices. Each microcircuit component, having already been subjected to a controlled environment of 5 percent helium and 95 percent nitrogen and then assembled, is placed in the chambers and sealed therein. The chambers are evacuated and helium flow rate (if present) is measured by a spectrometer.

REFERENCES:
patent: 3486365 (1969-12-01), Briggs
patent: 3572096 (1971-03-01), Meyer
patent: 3578758 (1971-05-01), Atshuler
patent: 3762212 (1973-10-01), Morley et al.
patent: 3813923 (1974-06-01), Pendelton
patent: 3847013 (1974-11-01), Luy

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