Fluid sprinkling – spraying – and diffusing – Unitary plural outlet means
Patent
1995-06-09
1999-11-30
Kashnikow, Andres
Fluid sprinkling, spraying, and diffusing
Unitary plural outlet means
239135, 239602, 239DIG19, 239556, 347 65, B05B 114, B41J 205
Patent
active
059927690
ABSTRACT:
Microchannels for conducting and expelling a fluid are embedded in a surface of a silicon substrate. A channel seal is made of plural cross structures formed integrally with the silicon substrate. The cross structures are arranged sequentially over each channel, each cross structure having a chevron shape. The microchannel is sealed by oxidizing at least partially the cross structures, whereby the spaces therebetween are filled. A dielectric seal which overlies the thermally oxidized cross structures forms a complete seal and a substantially planar top surface to the silicon substrate. The dielectric seal is formed of a low pressure chemical vapor deposition (LPCVD) dielectric layer. The channel is useful in the production of an ink jet print head, and has a polysilicon heater overlying the dielectric seal. A current passing through the heater causes a corresponding increase in the temperature of the ink in the microchannel, causing same to be expelled therefreom. After expulsion of the fluid, the microchannel is refilled by capillary action. Control circuitry, including bonding pads and sensors, can be formed integrally on the silicon substrate. In drug or chemical delivery systems, sensors and/or stimulation circuitry for sensing or inducing neural and other response can be formed directly in the silicon substrate which contains the microchannel. The sensor is disposed in close proximity to the chemical distribution nozzle, facilitating neural and other studies. Microvalve arrangements can be formed with the microchannel, controlled by the on-chip circuitry.
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"A Novel Fabrication Method of Capillary Tubes on Quartz for Chemical Analysis Applications," by Kaplan, et al., IEEE Proceedings, Micro Electro Mechanical Systems, Jan. 25-28, 1994.
"Silicon Processed Microneedles," by Lin, et al., The 7th International Conference on Solid State Sensors and Actuators; Jun. 7-10, 1993.
Chen Jingkuang
Wise Kensall D.
Evans Robin O.
Kashnikow Andres
The Regents of the University of Michigan
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