Microchannel electron multipliers

Details Microchannel electron multipliers Microchannel electron multipliers

1989-08-18

1992-02-04

Yusko, Donald J.

Electric lamp and discharge devices

Photosensitive

Secondary emitter type

313105CM, H01J 4304

Patent

active

050862480

ABSTRACT:
Microchannel plates (MCPs) and channel electron multipliers (CEMs) having channels etched by a directionally applied flux of reactive particles are disclosed. The channels are activated with thin film dynodes. Various embodiments including monolithic and stacked devices are disclosed. Activation of the channels is achieved by various techniques including CVD, LPD and native growth by oxidation.

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Lincoln et al., J. Vac. Sci. Technol. B., vol. 1, No. 4, Oct.-Dec. 1983, "Large Area Ion Beam Assisted Etching of GaAs with High Etch Rates and Controlled Anisotrophy", pp. 1043-1046.

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