Microcavity discharge device

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C313S356000

Reexamination Certificate

active

07025646

ABSTRACT:
A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.

REFERENCES:
patent: 5185552 (1993-02-01), Suzuki et al.
patent: 5327475 (1994-07-01), Golovanivsky et al.
patent: 5499282 (1996-03-01), Silfvast
patent: 6016027 (2000-01-01), DeTemple et al.
patent: 6031241 (2000-02-01), Silfvast et al.
*W.T. Silfvast, “Intense EUV Incoherent Plasma Sources for EUV Lithography and Other Applications,” Journal of Quantum Electronics, vol. 35, No. 5, May 1999, pp 700-708.
*J.W. Frame, et al., “Microdischarge Devices Fabricated in Silicon,” Appl. Phys. Lett., 71(9), Sep. 1, 1997, pp. 1165-1167.
*A. El-Habachi et al., “Generation of Intense Excimer Radiation from High-Pressure Hollow Cathode Discharges,” Appl. Phys. Lett., vol. 73, No. 7, Aug. 17, 1998, pp. 885-887.
*K.H. Schoenbach et al., “Microhollow Cathode Discharges,” Apply. Phys. Lett., 68(1), Jan 1, 1996, pp. 13-15.
*M.A. Klosner et al., “Intense Xenon Capillary Discharge Extreme-Ultraviolet Source in the 10-16-nm-Wavelength Region,” Optics Letters, vol. 23, No. 20, Oct. 15, 1988, pp. 1609-1611.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Microcavity discharge device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microcavity discharge device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microcavity discharge device will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3560688

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.