Microcasting of microminiature tips

Details Microcasting of microminiature tips Microcasting of microminiature tips

1989-01-13

1990-04-10

Powell, William A.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including aperture

156644, 156647, 156651, 156653, 156657, 1566591, 1566611, 156662, 357 69, 428614, 428632, 428209, 437182, 437228, 437245, B32B 310, H01L 21306, B44C 122, C03C 1500

Patent

active

049160028

ABSTRACT:
A microminiature tip and tip assembly is fabricated using microelectronic fabrication techniques. A masking aperture is formed in a dielectric layer which overlies a (100) silicon substrate. For a square aperture, a pyramidal pit is anisotropically etched into the surface of the silicon substrate. Tungsten is selectively deposited in the pit to form a pyramid-shaped microminiature point. Continued deposition of tungsten fills the aperture to form a base portion of the tip which integrally locks the tip to the dielectric layer, which is fabricated to form a support member for the tip.

REFERENCES:
patent: 4307507 (1981-12-01), Gray et al.
patent: 4312117 (1982-12-01), Robillard et al.
patent: 4585991 (1986-04-01), Reid et al.
patent: 4685996 (1987-08-01), Busta et al.
patent: 4786545 (1988-11-01), Sakuma et al.
Kiewit, "Microtool Fabrication by Etch Pit Replication", Rev. Sci. Instrum., vol. 44, No. 12, Dec. 1973, pp. 1741-1742, 156-647.

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