Microbridge structure with reinforcement section

Details Microbridge structure with reinforcement section Microbridge structure with reinforcement section

1998-09-09

2000-12-26

Robinson, Ellis

Stock material or miscellaneous articles

Structurally defined web or sheet

Including sheet or component perpendicular to plane of web...

428195, 428201, 2503381, 438401, 257619, B32B 700, B32B 300, G01J 500, H01L 2906, H01L 2176

Patent

active

061655872

ABSTRACT:
A microbridge structure includes a thin film section provided to be spaced from a substrate, and a supporting section formed around the thin film section and also spaced from the substrate, for supporting the thin film section. The supporting section is reinforced by a first reinforcement section, and the thin film section is reinforced by a second reinforcement section.

REFERENCES:
patent: 5260225 (1993-11-01), Liut
patent: 5286976 (1994-02-01), Cole
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5399897 (1995-03-01), Cunningham et al.
patent: 5551293 (1996-09-01), Boysel et al.

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