Microbridge flow sensor

Details Microbridge flow sensor Microbridge flow sensor

1990-02-20

1991-09-24

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

73195, G01F 168

Patent

active

050504290

ABSTRACT:
A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of the bridge portions.

REFERENCES:
patent: 4733559 (1988-03-01), Aine et al.

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