Microbolometer pixel and fabrication method utilizing ion...

Details Microbolometer pixel and fabrication method utilizing ion... Microbolometer pixel and fabrication method utilizing ion...

2011-03-29

2011-03-29

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07915585

ABSTRACT:
A microbolometer pixel and a reduced-step process for manufacturing it comprising the step of ion implantation of vanadium oxide whereby VOxis converted to a low resistivity mixed phase vanadium oxide (VOx/V2O3/VO/V) in the leg, metallized support post, and detector contact areas. Masking maintains high temperature coefficient of resistance (TCR) VOxin the sensing portion of the pixel bridge region. The implanted area resistivity and TCR can be controlled by ion implantation dose and energy.

REFERENCES:
patent: 4333808 (1982-06-01), Bhattacharyya et al.
patent: 5450053 (1995-09-01), Wood
patent: 5602393 (1997-02-01), Gerard
patent: 5629665 (1997-05-01), Kaufmann et al.
patent: 6144030 (2000-11-01), Ray et al.
patent: 6144285 (2000-11-01), Higashi
patent: 6320189 (2001-11-01), Ouvrier-Buffet et al.
patent: 6690014 (2004-02-01), Gooch et al.
patent: 7268350 (2007-09-01), Ouvrier-Buffet et al.
patent: 7491938 (2009-02-01), Geneczko et al.
patent: 2006/0118721 (2006-06-01), Antoszewski et al.
patent: 2007/0272864 (2007-11-01), Li et al.
patent: 2009/0050808 (2009-02-01), Ushimi et al.
Vieider et al., “Low-cost far infrared bolometer camera for automotive use,” 2007, Proceedings of SPIE, vol. 6542, pp. 65421L-1-6542L-10.
Naguib, H.M. et al., “On the Increase in the Electrical Conductivity of MoO3 and V2O5 Following Ion Bombardment”, Journal Phys. Chem. Solids, 1972, pp. 1751-1759, vol. 33, Pergamon Press, Great Britain.
PCT Search Report dated May 21, 2010 of Patent Application No. PCT/US10/27781 filed Mar. 18, 2010.

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