Microbolometer IR focal plane array (FPA) with in-situ mirco...

Details Microbolometer IR focal plane array (FPA) with in-situ mirco... Microbolometer IR focal plane array (FPA) with in-situ mirco...

2008-06-10

2008-06-10

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S352000

Reexamination Certificate

active

07385199

ABSTRACT:
A microbolometer IR FPA is provided with in-situ vacuum sensing capability by realizing that the IR sensor microbolometer pixel element itself may be used as a vacuum sensor. The application of an electrical signal to the resistive element heats the bolometer material thereby producing a variable resistance related to vacuum level. The degree of variability for a given material depends on the efficiency of heat transfer from the material to the surrounding environment. In a good vacuum, heat transfer is poor, and thus heat will be retained in the material to produce a relatively large temperature increase and the resistance variability will be large. In a poor vacuum, heat is readily transferred to the environment and the temperature rise will be relatively small and thus resistance variability will be small. Consequently, the variable resistance magnitude can be readout to determine the vacuum level.

REFERENCES:
patent: 5729019 (1998-03-01), Krafthefer et al.
patent: 5801383 (1998-09-01), Wada et al.
patent: 6453748 (2002-09-01), Pryor
patent: 2005/0135724 (2005-06-01), Helvajian et al.
patent: 2005/0176179 (2005-08-01), Ikushima et al.

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