Microbolometer detector element with enhanced sensitivity

Details Microbolometer detector element with enhanced sensitivity Microbolometer detector element with enhanced sensitivity

1995-06-07

1997-02-11

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, 2503381, 25037008, G01J 502, G01J 520

Patent

active

056023936

ABSTRACT:
A microbolometer detector element includes an optically absorptive material structure that absorbs a portion of incident radiation, and has a plurality of openings that diffract other portions of the incident radiation. The absorptive structure has an electrical resistivity that varies as a function of its temperature. An optical radiation director re-directs the diffracted optical radiation back to the absorptive structure. The distance between the radiation director and the absorptive structure is tuned so that, for a predetermined design wavelength, optical radiation that is re-directed back to the absorptive structure constructively interferes with incident optical radiation that is not reflected by the absorptive structure. The constructive interference causes the absorptive structure to absorb substantially more optical radiation at the design wavelength than at other wavelengths. The re-directed radiation also destructively interferes with incident optical radiation that is reflected by the absorptive structure, thereby suppressing reflection of radiation. A circuit is connected to the absorptive structure to measure its electrical resistivity.

REFERENCES:
patent: 5010251 (1991-04-01), Grinberg et al.
patent: 5021663 (1991-06-01), Hornbeck
patent: 5286976 (1994-02-01), Cole
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5367167 (1994-11-01), Keenan
R. A. Wood, et al., Monolithic Silicon Uncooled Focal Planes for High-Density Array Development (HIDAD) Program, Proc. IRIS Detector, 1991, vol. II.

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