Microbolometer

Details Microbolometer Microbolometer

1996-01-16

1997-11-18

Picardat, Kevin

Fishing, trapping, and vermin destroying

437 2, 437 4, 437903, H01L 3118

Patent

active

056886993

ABSTRACT:
A method is provided for forming a bolometer having an infrared sensitive material disposed on a platform elevated over a surface of a semiconductor body. The method includes forming a thermally insulating support layer to provide the platform and legs for supporting the platform over the semiconductor body. A layer of electrically conductive material is formed over the support layer and onto electrical contacts of an electronic circuit formed in the semiconductor body. The layer of electrically conductive material is patterned into electrical conductors passing, at a proximal end thereof, from the contact region of the electronic circuit upwardly to, at the distal end thereof, the platform region. The patterned electrically conductive layer is used as a mask for selectively removing portions of the support layer exposed by the patterned electrically conductive layer while portions of the support layer remain disposed under such patterned electrically layer.

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patent: 5288649 (1994-02-01), Keenan
patent: 5529949 (1996-06-01), Stan et al.
patent: 5602043 (1997-02-01), Beratan et al.
patent: 5627112 (1997-05-01), Tennant et al.

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