Microbeam sensor contact damper

Details Microbeam sensor contact damper Microbeam sensor contact damper

1986-06-09

1987-06-16

Scott, J. R.

Electricity: circuit makers and breakers

Special application

Change of inclination or of rate of motion responsive

200 6148, 200181, H01H 3514, H01H 5700

Patent

active

046737774

ABSTRACT:
The present invention consists of an apparatus for damping the movement of a microbeam sensor. The damping device consists of a gold plated chrome bar, or the like being placed, or fabricated, above the microbeam. This damper prevents excessive movement that could be caused from harmonic vibrations or the like.

REFERENCES:
patent: 3144528 (1964-08-01), Pino
patent: 3177312 (1965-04-01), Clarke
patent: 3413497 (1968-11-01), Atalla
patent: 3764820 (1973-10-01), White et al.
patent: 4480162 (1984-10-01), Greenwood
patent: 4543457 (1985-09-01), Petersen et al.
K. E. Petersen; IBM Tech. Disc. Bull.; "Bistable Micromechanical Storage Element in Silicon", vol. 20, No. 12, May 1978, p. 5309.
K. E. Petersen; IBM J. Res. Develop.; "Micromechanical Membrane Switches on Silicon"; vol. 23, No. 4, Jul. 1979, pp. 376-385.
L. Holland et al; IBM Tech. Disc. Bull.; "Bottom Contact Micromechanical Switching Geometry"; vol. 21, No. 3, Aug. 1978, pp. 1207, 1208.

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