Microbeam laser machine for acting on objects having thin layers

Details Microbeam laser machine for acting on objects having thin layers Microbeam laser machine for acting on objects having thin layers

1987-12-22

1989-04-25

Albritton, C. L.

Electric heating

Metal heating

By arc

21912174, 21912175, 21912183, B23K 2600

Patent

active

048250341

ABSTRACT:
A microbeam laser machine for operating on objects having thin layers comprises a platen (14) which is rigid and undeformable and which has optical components mounted thereon defining a laser beam transmission path (34, 36, 38, 46), an illumination path (54, 55, 46), and an observation path (70, 74, 76). The invention is intended, in particular, for microoperations on integrated circuits and other objects having thin layers.

REFERENCES:
patent: 3192318 (1965-06-01), Schleich
patent: 3769663 (1973-11-01), Goldman
patent: 3782823 (1974-01-01), Kantorski et al.
patent: 4330208 (1982-05-01), Eloy

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