Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2011-05-31
2011-05-31
Shafer, Ricky D (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S212100, C359S221200, C359S224100, C359S295000, C359S846000, C359S849000, C359S900000, C355S067000, C355S077000
Reexamination Certificate
active
07952780
ABSTRACT:
A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.
REFERENCES:
patent: 4280756 (1981-07-01), Albertinetti
patent: 4441791 (1984-04-01), Hornbeck
patent: 4944580 (1990-07-01), MacDonald et al.
patent: 5210653 (1993-05-01), Schell
patent: 5526172 (1996-06-01), Kanack
patent: 5535047 (1996-07-01), Hornbeck
patent: 5579151 (1996-11-01), Cho
patent: 6040909 (2000-03-01), Hasegawa et al.
patent: 6384952 (2002-05-01), Clark et al.
patent: 6842277 (2005-01-01), Watson
patent: 6914712 (2005-07-01), Kurosawa
patent: 7125128 (2006-10-01), Novak
patent: 7239372 (2007-07-01), Honda
patent: 7518780 (2009-04-01), Papavasiliou et al.
patent: 2004/0207939 (2004-10-01), Kurosawa
patent: 2005/0057120 (2005-03-01), Nanataki et al.
patent: 2005/0082946 (2005-04-01), Takeuchi et al.
patent: 2005/0111815 (2005-05-01), Kimura
patent: 2005/0236928 (2005-10-01), Kurozuka et al.
patent: 8-334709 (1996-12-01), None
patent: 2004-117832 (2004-04-01), None
patent: 2004-119933 (2004-04-01), None
patent: 2005-57250 (2005-03-01), None
patent: 2005-91576 (2005-04-01), None
patent: 2005-91578 (2005-04-01), None
patent: 2005-341788 (2005-12-01), None
International Search Report mailed Oct. 2, 2007, for International Application No. PCT/JP2007/063578.
Written Opinion of the International Searching Authority for the corresponding PCT Application No. PCT/JP2007/063578 mailed Oct. 2, 2007.
Owa Soichi
Suzuki Junji
Nikon Corporation
Shafer Ricky D
Staas & Halsey , LLP
LandOfFree
Microactuator, optical device and exposure apparatus, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microactuator, optical device and exposure apparatus, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microactuator, optical device and exposure apparatus, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2685160