Microactuator, head gimbal assembly, and disk drive device

Details Microactuator, head gimbal assembly, and disk drive device Microactuator, head gimbal assembly, and disk drive device

2008-11-14

2011-11-29

Nguyen, Viet (Department: 2827)

Dynamic magnetic information storage or retrieval

Head mounting

Disk record

C360S245900, C360S245500, C360S294400, C360S234500, C360S234600, C360S234300, C360S234700

Reexamination Certificate

active

08068313

ABSTRACT:
Embodiments of the present invention relate to approaches to effectively let noise on a head slider bonded to a silicon substrate of a microactuator, escape to the ground. A head gimbal assembly (HGA) according to an embodiment of the present invention comprises a microactuator bonded to a gimbal tongue. The microactuator comprises a piezoelectric element and a movable part for moving in response to expansion or contraction of the piezoelectric element. The motion of the movable part causes a head slider to slightly move. The microactuator further comprises a conductive path including an impurity-containing silicon layer formed on the silicon substrate. The conductive path transmits electric charge of the head slider to a suspension. The conductivity of the impurity-containing silicon layer is lower than the one of the silicon substrate so that the noise charge of the head slider may escape to the suspension.

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