Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
1999-11-18
2002-02-05
Vo, Anh T. N. (Department: 2861)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
C347S054000
Reexamination Certificate
active
06343849
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a microactuator for ink jet printer head and a manufacturing method thereof. In particular, the invention relates to a manufacturing method of a microactuator for ink jet printer head using a shape memory alloy and the microactuator manufactured by the method.
2. Description of the Prior Art
Generally microactuator for ink jet printer head using a shape memory alloy is composed of a silicon substrate
10
where lower space is formed, an insulation film
12
made to cover the lower space part upon the silicon substrate
10
, and a shape memory alloy layer
14
formed upon insulation film
12
as in FIG.
1
.
A shape memory alloy layer has been formed by multicoating by simultaneous sputtering or evaporation etc. of metal components which are to form the shape memory alloy layer in order to manufacture a microactuator for ink jet printer head using a shape memory alloy.
Shape memory property is bestowed to shape memory alloy layer by repeated shape memory process to thermally treat the formed shape memory alloy layer by heating in furnace or heating by supplying an electric current and then to cool it.
Such heat treatment process is varied according to shape memory alloy components and their composition; and rearrangement degree of components comprising the shape memory alloy is varied according to heat treatment method and stage.
Shape memory alloy components get to have shape memory property by repeated rearrangement process in shape memory process and the acquired property is expressed outside.
Shape memory alloy layer is formed in conventional methods by sputtering or evaporation by multitarget method or using target made of alloy from components to form the shape memory alloy.
But the above methods have problem that those cannot be applied to form a shape memory alloy with 3-component system while those may be applied to form a shape memory alloy with a 2-component system.
And there is problem that composition is not uniform for a whole because composition ratios of components are different in minute parts although the above methods may be applied in 2-component systems.
Because component composition ratios of each part are not uniform, there is problem that we cannot get uniform shape memory effect from heat treatment process sensitive to shape memory alloy components and composition ratios of shape memory alloy components.
SUMMARY OF THE INVENTION
The present invention to solve the above problem aims to provide a microactuator for ink jet printer head using a shape memory alloy excellent in shape memory effect as composition of each part is uniform for a whole by way of repeated step of independently forming each formation component of shape memory alloy and a manufacturing method thereof.
The present invention to achieve the above purpose features a manufacturing method of a microactuator for ink jet printer head using a shape memory alloy, the method comprising steps of: providing a silicon substrate; forming an insulating film on the surface of the silicon substrate; forming a shape memory alloy layer by independent repetitive molding of each layer of respective component element constituting the shape memory alloy on the insulation film; bestowing a shape memory property by thermally treating the shape memory alloy layer; and forming a lower space part by etching the silicon substrate, whereby it is easy in control of components constituting the shape memory alloy layer and excellent in repetition uniformity of ingredient composition ratios.
And the present invention features a microactuator for ink jet printer head using a shape memory alloy, the microactuator comprising: a silicon substrate; a lower space part formed by etching at the silicon substrate; an insulating film formed on the silicon substrate surface to cover the lower space part which film applies compressive stress to the silicon substrate and undergoes bending transformation by the compressive stress of the silicon substrate which stress is expressed by the lower space part; and a shape memory alloy layer formed upon the insulation film so as to cover the lower space part which alloy layer is formed by independent sequential cumulative repetition of layering of each layer of respective composition element constituting the shape memory alloy and is bestowed shape memory property by heat treatment, whereby it is easy in control of components constituting the shape memory alloy layer and excellent in repetition uniformity of ingredient composition ratios.
REFERENCES:
patent: 6130689 (2000-10-01), Choi
patent: 6258284 (2001-07-01), Silverbrook
Jung Myung Song
Park Sung June
Yun Sang Kyeong
Samsung Electro-Mechanics Co. Ltd.
Vo Anh T. N.
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