Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2001-08-29
2003-10-28
Snow, Walter E. (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S701000
Reexamination Certificate
active
06639411
ABSTRACT:
BACKGROUND OF THE INVENTION
Microactuated suspensions are generally known and disclosed, for example, in the Krinke et al. U.S. Pat. No. 6,046,888.
FIG. 1
is an illustration of one such microactuated suspension
30
. The embodiment shown in
FIG. 1
has an actuator or motor
32
formed by a pair of piezoelectric (PZT) elements
34
,
36
for rotating or otherwise driving a load beam
38
with respect to a baseplate
40
in response to electric drive signals. Piezoelectric materials are also widely used as transducers of mechanical motion into electrical energy.
The piezoelectric elements are typically mounted to the suspension by adhesive. Adhesive fractures sometimes develop during the manufacturing process. As a result of these fractures, the piezoelectric elements are not properly mounted to the suspension, and will not function properly. Fractures are also sometimes present in the piezoelectric elements themselves, and can also prevent the microactuator from functioning properly. Still other microactuator failures occur when the piezoelectric elements are depoled, when the elements are oriented or electrically interconnected with the same polarity, and when the bonds between the drive signal lead wires and the element terminals are broken.
Known testing approaches for identifying motor failures include resistance and stroke tests. There remains, however, a continuing need for improved motor failure test methods and associated systems. Methods and systems which are capable of being efficiently performed and which can accurately identify a wide range of failures would be particularly desirable.
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Tanner et al. Reliability of a MEMS Torsional Racheting Actuator. IEEE 01CH37167. 39 th Anual International Reliability Physys Symposium Sep. 2001. pp. 81-90.*
Takaharu Idogaki et al., Characteristics of Piezoelectric Locomotive Mechanism for an In-Pipe Micro Inspection Machine. Six international Sysposium on Micro and human Science Aug. 1995. pp. 193-198.*
Tanner et al. Reliability of a MEMS Torsional Racheting Actuator. IEEE 01CH37167. 39 th Anual International Reliability Physys Symposium Sep. 2001. pp. 81-90.*
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Faegre & Benson LLP
Hutchinson Technology Incorporated
Nguyen Vincent Q.
Snow Walter E.
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