Microacoustic shear bulk wave device

Details Microacoustic shear bulk wave device Microacoustic shear bulk wave device

1976-09-21

1978-07-18

Smith, Alfred E.

Wave transmission lines and networks

Coupling networks

With impedance matching

333 72, H03H 730, H03H 710

Patent

active

041018524

ABSTRACT:
A microacoustic signal processing device for propagation of shear bulk waves in a substrate. A preferred embodiment of the device includes a substrate having opposed, polished principal and second surfaces. An input interdigital transducer supported on the principal surface includes a plurality of aluminum electrodes photoetched on the principal surface; a ZnO layer overlying the electrodes; and a conductive aluminum film overlying the ZnO layer. Shear bulk waves propagated by the input transducer are available for processing at various locations on the principal and second surfaces of the substrate.

REFERENCES:
patent: 2672590 (1954-03-01), McSkimin
patent: 3387233 (1968-06-01), Parker, Jr.
patent: 3593214 (1971-07-01), Cooper
patent: 3760299 (1973-09-01), Vasile

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