Micro-vacuum device

Details Micro-vacuum device Micro-vacuum device

1995-09-11

1999-11-02

Patel, Ashok

Electric lamp and discharge devices

With temperature modifier

Radiating type surface

313 41, 313309, 313311, 313336, 313351, 313496, H01J 130

Patent

active

059776935

ABSTRACT:
A micro-vacuum device comprises a substrates an emitter having a sharp end formed above the substrate, a gate electrode provided above the emitter, and an anode having cooling means provided oppositely to the substrate above the gate electrode.

REFERENCES:
patent: 5012153 (1991-04-01), Atkinson et al.
patent: 5138220 (1992-08-01), Kirkpatrick
patent: 5150019 (1992-09-01), Thomas et al.
patent: 5300853 (1994-04-01), Watanabe et al.
patent: 5397957 (1995-03-01), Zimmerman
patent: 5569973 (1996-10-01), Zimmerman
Uniform, Stable and High Integrated Field Emitter Arrays for High Performance Displays and Vacuum Microelectronincs Switching Devices, Nakamoto et al, pp. 29.3.1-29.3.4, Dec. 1997.
C. A. Spindt et al., Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones; Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.
Junji Itoh, Vacuum Microelectronics; Applied Physics, vol. 59, pp. 164-169, Dec. 1990.

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