Micro-structures having structural members capable of withstandi

Details Micro-structures having structural members capable of withstandi Micro-structures having structural members capable of withstandi

1997-03-12

1999-03-30

Loney, Donald

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428188, 428332, 4285428, 428543, B32B 702

Patent

active

058886338

ABSTRACT:
A micro-structure including at least a first bendable member having first and second ends and being supported at the first end only, and either being spaced from a rigid component, or being spaced from a second bendable member also supported only at a first end thereof. The first member has a length L from the first end to the second end specified by one of the following equations: (a) for the first member adjacent to the rigid component: L<(2Edt.sup.3 /3P).sup.1/4, wherein E is a Young's modulus of a material of the first member; d is a distance of the space between the first member and the rigid component; t is a thickness of the first member; and P is an external pressure applied to the first member; or b) for the first member adjacent to the second member: L<(2Ed't.sup.3 /3P).sup.1/4, wherein E, t and P are as defined above; and d' is a distance of the space between the first and second members.

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patent: 5340763 (1994-08-01), Dennison
patent: 5342800 (1994-08-01), Jun
Stemme, Goran, "Resonant Silicon Sensors", J. Micromech. Microeng, vol. 1 (1991), pp. 113-125.
S. Wolf, "Silicon Processing for the VLSI Era", Lattice Press, vol. 2, (1991), pp. 214-215.

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