Micro-structure gap control technology and structure formed...

Details Micro-structure gap control technology and structure formed... Micro-structure gap control technology and structure formed...

2006-11-21

2006-11-21

Dang, Hung (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07139110

ABSTRACT:
A grating manufactured by a micro-structure gap control technique is provided in this invention. The grating includes a first structural part, a second structural part and a substrate. The first structural part includes a first micro-structure and a concavity, the second structural part includes a second micro-structure and an island structure located within the concavity, wherein a gap exists between the inland structure and the concavity. Further, the substrate is bonded to the first structural part and the second structural part for supporting the first structural part and the second structural part.

REFERENCES:
patent: 6356689 (2002-03-01), Greywall
patent: 6791742 (2004-09-01), Staker et al.
patent: 6813054 (2004-11-01), Aksyuk et al.

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