Micro-sensor thin-film anemometer

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

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055764886

ABSTRACT:
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14.degree. half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.

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S. C. Ling et al., "The Hot-Film Anemometer: A New Device for Fluid Mechanics Research", J. Aeronautical Sci., Sep. 1956, pp. 890-891.
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