Micro sample heating apparatus and method of making the same

Details Micro sample heating apparatus and method of making the same Micro sample heating apparatus and method of making the same

2008-07-08

2008-07-08

Allen, Andre J (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

C250S288000

Reexamination Certificate

active

11426015

ABSTRACT:
A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.

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