Micro-resonator, frequency filter and communication apparatus

Details Micro-resonator, frequency filter and communication apparatus Micro-resonator, frequency filter and communication apparatus

2005-11-28

2008-12-09

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S200000

Reexamination Certificate

active

07463116

ABSTRACT:
A highly reliable micro-resonator and communication apparatus is provided in which an influence on a substrate caused by an interaction generated by an oscillation between adjacent micro-resonant elements is eliminated.The micro-resonant element includes a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate, in which a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.

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patent: 6624726 (2003-09-01), Niu et al.
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patent: 7227432 (2007-06-01), Lutz et al.
patent: 7286027 (2007-10-01), Tada et al.
patent: 2007/0171001 (2007-07-01), Naniwada et al.

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