Micro resonator

Details Micro resonator Micro resonator

1992-09-29

1993-11-30

Chilcot, Jr., Richard E.

Measuring and testing

Dynamometers

Responsive to force

73702, 73705, G01L 110

Patent

active

052654796

ABSTRACT:
An optically driven microresonator sensor comprising a sensor member having a vibratory bridge onto which a light beam is directed at a non-zero angle relative to a normal to said bridge, the light beam causing the bridge to oscillate at its resonant frequency, in use, in the direction of said normal, between a first position, where most of the incident light is reflected by the bridge to a light intensity measuring system, and a second position, where most of the incident light is not intercepted by said bridge, so that the reflected incident light sensed by said light intensity measuring system is reduced, the resonant frequency of oscillation of the bridge thus determined from said system, being dependent upon the nature of an applied force, such as stress, exerted on the sensor member.

REFERENCES:
patent: 4345482 (1982-08-01), Adolfson et al.
patent: 4567451 (1986-01-01), Greenwood
patent: 4743752 (1988-05-01), Olsen et al.
patent: 4884450 (1989-12-01), Greenwood et al.
patent: 4942767 (1990-07-01), Haritonidis et al.
patent: 4972076 (1990-11-01), Wilson

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