Micro-pump and method for production thereof

Details Micro-pump and method for production thereof Micro-pump and method for production thereof

1993-01-29

1994-11-08

Gluck, Richard E.

Pumps

Motor driven

Electric or magnetic motor

310 22, F04B 1704

Patent

active

053622138

ABSTRACT:
A micro-pump having a cross-sectional area of not more than 5 mm.sup.2 and usable as a drive source for the operation of a micro-machine and as the controlled flow of a fluid and a method for the production of this micro-pump are provided. The micro-pump is characterized by comprising a comb-shaped stationary electrodes, a fluid chamber, a piston formed in the fluid chamber, comb-shaped movable electrodes formed integrally with the piston, a conductive film for imparting a grounding potential to the piston and the comb-shaped movable electrodes, and check valves and consequently having a drive source integrally formed therein.

REFERENCES:
patent: 1572126 (1926-02-01), Bothner
patent: 1783611 (1935-12-01), Gohring
patent: 1804375 (1931-05-01), Cobe
patent: 2578902 (1951-12-01), Smith
patent: 4795318 (1988-01-01), Cusack
patent: 4808084 (1989-02-01), Tsubouchi et al.
patent: 4815946 (1989-03-01), Cusack
IEICE Technical Report, "Check Valve," vol. 89, No. 173, pp. 29-34 (Aug. 18, 1989).
Journal of the Institute of Electronics, Information and Communication Engineers (IEICE), "Fabrication of a Micro-Pump for Integrated Chemical Analysing Systems," C. vol. J71-C, No. 12, pp. 1705-1711 (Dec. 1988).
Technical Digest of the 10th Sensor Symposium, "Fabrication of Poly-Silicon Microvalve," Yamashita et al., pp. 29-32, 1991.

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