Abrading – Machine – Rotary tool
Patent
1996-07-22
1998-10-06
Eley, Timothy V.
Abrading
Machine
Rotary tool
269 71, 451279, 451366, 451387, 451405, B24B 4106
Patent
active
058168990
ABSTRACT:
Apparatus and method for grinding semiconductor chips and other specimens prior to microscopic examination thereof by supporting a specimen on a specimen mount, fixing the specimen mount to a lower end of a lower arm, connecting an upper end of the lower arm to a swingable arm by a horizontal pivot which permits the lower arm and specimen mount to move upwardly and downwardly relative to the swingable arm, providing a stop to limit downward movement of the specimen mount relative to the swingable arm when the lower arm reaches a zero position, moving the swingable arm downwardly to lower the specimen to engage an underlying rotatable grinding platen to define a zero position, and continuing to move the swingable arm downwardly beyond the zero position by an amount corresponding to the amount of material to be removed from a lower portion of the specimen so that the stop will prevent removal of additional material.
REFERENCES:
patent: 1736977 (1929-11-01), Liebl
patent: 3815289 (1974-06-01), Hoffman
patent: 3818641 (1974-06-01), Long
patent: 3902283 (1975-09-01), Bean
patent: 4106240 (1978-08-01), De Bartolo
patent: 4517770 (1985-05-01), Leibowitz
patent: 4536992 (1985-08-01), Hennenfent et al.
patent: 4625460 (1986-12-01), Burgess et al.
patent: 5272844 (1993-12-01), Burgess et al.
Hart Michael F.
Holt Scott D.
Buehler Ltd.
Eley Timothy V.
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