Micro positioning device

Details Micro positioning device Micro positioning device

1992-05-29

1994-10-04

Will, Thomas B.

Geometrical instruments

Gauge

Work support adjustment

33 1M, 33573, B23Q 1600

Patent

active

053514122

ABSTRACT:
A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by depositing a pair of aluminum electrodes on a piezoelectric element bonded on a silicon wafer, vertically moving the piezoelectric element, arranging a plurality of micro actuators whose contact pin ends, formed on the aluminum electrodes, rotate on a surface as an array, and displacing in the horizontal direction a moving member arranged on the micro actuator array.

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patent: 5140215 (1992-08-01), Yamaguchi
patent: 5142791 (1992-09-01), Kobayashi et al.
H. Seidel, et al., "Capacitive Silicon Accelerometer with Highly Symmetrical Design", Transducert '89 Lecture No. B10.4, Jun. 1989.
K. Ikeda, et al., "Silicon Pressure Sensor Integrates Resonant Strain Gauge on Diaphragm", Transducers '89 Lecture No. B4.3, Jun. 1989.

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