Micro-opto-electro-mechanical waveguide switches

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

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C385S016000, C385S020000

Reexamination Certificate

active

07085445

ABSTRACT:
As the traffic volume carried by telecommunication networks has been rapidly increased as a result of the bandwidth-intensive applications such as Internet access, electronic commerce, multimedia applications, and distributed computing, it is imperative to utilize the optical network for backbone, metropolitan, and local area networks. The optical networks employing optical fibers as the transmission medium have exhibited a superior performance/cost ratio for both long-haul and short-haul routes and the emerging dense wavelength division multiplexing (DWDM)/all-optical networks have shown a promising potential to improve speed, capacity and connectivity of optical telecommunication networks. The present invention provides Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) by integrating MEMS actuators and micromachined PLCs on the same substrate. The MOEM-WS is an integrated hybrid microsystem: Micro-Opto-Electro-Mechanical System (MOEMS) and it is particularly applicable for optical cross-connect (OXC) switches and optical add/drop multiplexers (OADM). The MOEM-WS can provide an essential fiber switching capability for DWDM/all-optical networks with numerous accompanying benefits such as low cost, small crosstalk, reliability, compactness, high speed, reconfigurability, modularity, scalability, and insensitiveness to signal wavelength and polarization.

REFERENCES:
patent: 4955686 (1990-09-01), Buhrer et al.
patent: 5024500 (1991-06-01), Stanley et al.
patent: 5144637 (1992-09-01), Koch et al.
patent: 5416861 (1995-05-01), Koh et al.
patent: 5694499 (1997-12-01), Tillerot et al.
patent: 5761350 (1998-06-01), Koh
patent: 5832149 (1998-11-01), Omizu et al.
patent: 5867617 (1999-02-01), Pan et al.
patent: 5892862 (1999-04-01), Kidder et al.
patent: 5920665 (1999-07-01), Presby
patent: 5923798 (1999-07-01), Aksyuk et al.
patent: 5926588 (1999-07-01), Murakami et al.
patent: 6169827 (2001-01-01), Holman et al.
patent: 6195478 (2001-02-01), Fouquet
patent: 6219472 (2001-04-01), Horino et al.
patent: 6363183 (2002-03-01), Koh
Martin Hoffman et al., “Optical Fiber Switches Based on Full Wafer Silicon Micromachining,” Proceeding:MME 98-Micromechanics Europe, Ulvik, Norway, pp. 96499, 1998.
C. Marxer et al., “Reflective Modulators and By-Pass-Switches: two MEMS Components for Fiber Optic Communication,” 1998 IEEE Summer Topical Meetings, Monterey, CA, pp. 27-28, 1998.
Q. Lai et al., “Low-Power Compact 2X2 Thermooptic Silica-on-Silicon Waveguide Switch with Fast Response” IEEE Photonics Technology Letters, vol. 10, No. 5, pp. 681-683, May 1998.
R. Moosburger et al., “4X4 Digital Optical Matrix Switch Using Polymeric Oversized Rib Waveguides,” IEEE Photonics Technology Letters (PTL), vol. 10, No. 5, pp. 684-686, May 1998.
C.G.P. Herben et al., “A Compact Integrated InP-Based Single-Phasar Optical Crossconnect,” IEEE PTL, vol. 10, No. 5, pp. 678-680, May 1998.
Takashi Goh et al., “High-Extinction Ratio and Low-Loss Silica-Based 8X8 Thermooptic Matrix Switch,” IEEE PTL, vol. 10, No. 3, pp. 358-360, Mar. 1998.
Takashi Goh et al., “Low-Loss and High-Extinction Ratio Silica-Based Strictly Nonblocking 16X16 Thermooptic Matrix Switch,” IEEE PTL, vol. 10, No. 6, pp. 810-812, Jun. 1998.
Jane M. Simmons et al., “Optical Crossconnects of Reduced Complexity for WDM Networks with Bidirectional Symmetry,” IEEE PTL, vol. 10, No. 6, pp. 819-821, Jun. 1998.
Chuan Pu et al., “Surface Micromachined Integrated Optic Polarization Beam Splitter,” IEEE PTL, vol. 10, No. 7, pp 988-990 Jul. 1998.
B. Barber et al., “A Fiber Connectorized MEMS Variable Optical Attenuator,” IEEE PTL, vol. 10, No. 9, pp. 1262-1264, Sep. 1998.
L.Y. Lin et al., “High-Density Micromachined Polygon Optical Crossconnects Exploiting Network Connection Symmetry,” IEEE PTL, vol. 10, No. 10, pp. 1425-1427, Oct. 1998.
Cronel Marxer et al., “A Variable Optical Attenuator Based on Silicon Micromechanics,” IEEE PTL, vol. 11, No. 2, pp. 233-235, Feb. 1999.
Neil A. Jackman et al., “Optical Cross Connects for Optical Networking,” Bell Labs Technical Journal, pp. 262-281, Jan.-Mar. 1999.
D. Bruce Buchholz et al., “Broadband Fiber Access: A Fiber-to-the-Customer Access Architecture,” Bell Labs Technical Journal, pp. 282-299, Jan.-Mar. 1999.
C. Randy Giles et al., “The Wavelength Add/Drop Multiplexer for Lightwave Communication Networks,” Bell Labs Technical Journal, pp. 207-229, Jan.-Mar. 1999.
Masayuki Okuno et al., “Silica-Based 8X8 Optical Matrix Switch Integrating New Switching Units with Large Fabrication Tolerance,” IEEE/OSA JLT, vol. 143, No. 5, pp. 771-779, May 1999.
Y.P. Li et al., “Silica-based optical integrated circuits,” IEE Proceedings-Optoelectron, vol. 143, No. 5, pp. 263-280, Oct. 1996.
M. Kawachi, “Recent progress in silica-based planar lightwave circuits on silicon,” IEE Proceedings-Optoelectron, vol. 143, No. 5, pp. 257-262, Oct. 1996.
C.A. Jones et al., “Hybrid integration onto silicon motherboards with planar silica waveguides,” IEE Proceedings-Optoelectron, vol. 143, No. 5, Oct. 1996.
Cornel Marxer et al., “Vertical Mirrors Fabricated by Deep Reactive Ion Etching for fiber-Optic Switching Applications,” IEEE/ASME Journal of MEMS, vol. 6, No. 3, pp. 277-284, Sep. 1997.
Wen-Han Huan et al., “Released Si Microstructures Fabricated by Deep Etching andShallow Diffusion,” IEEE/ASME Journal of MEMS, vol. 5, No. 1, pp. 18-23, Mar. 1996.
Wen-Han Juan et al., “High-Aspect-Ratio Si Vertical Micromirror Arrays for Optical Switching,” IEEE/ASME journal of MEMS, vol. 7, No. 2, pp. 207-213, Jun. 1998.
Wen-Han Juan et al., “Controlling sidewall smoothness for micro-machined Si Mirrors and lenses,” AVS Journal of Vacuum Science and Technology-B, vol. 14, No. 6, pp. 4080-4084, Nov./Dec. 1996.
Yogesh B. Gianchandani, “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices,” IEEE/ASME Journal of MEMS, vol. 1, No. 2, pp. 77-85, Jun. 1992.
William C. Tang et al.,“Electrostatic Comb Drive Levitation and Control Method,” IEEE/ASME Journal of MEMS, vol. 1, No. 4, pp. 170-178, Dec. 1992.
Kuniharu Kato et al., “Packaging of Large-Scale Planar Lightwave Circuits,” IEEE Transaction on Components, Packaging, and Manufacturing Tech-PartB, vol. 21, No. 2, pp 121-129, May 1998.
Seungug Koh et al., “Optoelectronic multichip modules for high-speed computer systems and communication networks,” SPIE Optical Engineering, vol. 36, No. 5, pp. 1319-1325, May 1997.
Seungug Koh et al., “Synchronous global clock distribution on Multichip modules using optical waveguides,” SPIE Optical Engineering, vol. 33, No. 5, pp. 1587-1595, May 1994.

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