Micro opto electro mechanical device

Details Micro opto electro mechanical device Micro opto electro mechanical device

2006-02-21

2006-02-21

Healy, Brian (Department: 2883)

Optical waveguides

With optical coupler

Switch

C385S017000

Reexamination Certificate

active

07003192

ABSTRACT:
A hybrid optical component is described incorporating a planar lightguide circuit (PLC) chip2having at least two waveguides provided thereon which are separated by a trench, and a MEMS chip3attached to the PLC chip and incorporating a MEMS element displaceable relative to the trench so as to control the passage of an optical signal between the two waveguides. A cap4is sealingly engaged with the PLC chip2to form a housing therewith which houses said MEMS chip3hermetically therein. The component may act as a variable optical attenuator (VOA) device in which a MEMS shutter attenuates an optical signal passing between two waveguides, or may be an optical switch in which a MEMS mirror is used to switch an optical signal from a first waveguide between at least two other waveguides which intersect with the first waveguide at the trench.

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