Micro-optic device with means for precisely positioning micro-op

Optical waveguides – Integrated optical circuit

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Details

385 49, 385 52, G02B 612

Patent

active

060647817

ABSTRACT:
The invention concerns a device whereby micro-optic parts, particularly those that tend to tilt because of their geometric dimensions, can be precisely arranged on a support. The device according to the invention comprises a support (TR) on which several guide elements (FE1 . . . FE4) are placed in cutouts (A1 l . . . A4). The arrangement of the guide elements (FE1 . . . FE4) is such that the micro-optic part (BT) to be positioned can be inserted between the guide elements (FE1 . . . FE4). In this way an active adjustment is not required. In a particularly advantageous embodiment of the invention, the guide elements (FE1 . . . FE4) touch the micro-optic part (BT) at points that are located at different distances from the surface of the support (TR). In this way tilting is prevented in a particularly effective manner. The support (TR) is made of a silicon substrate for example; the guide elements (FE1 . . . FE4) can be uncoated spherical lenses which are placed in cutouts etched into the substrate by means of wet chemical methods.

REFERENCES:
patent: 5123073 (1992-06-01), Pimpinella
patent: 5218663 (1993-06-01), Isono et al.
patent: 5257332 (1993-10-01), Pimpinella
patent: 5453827 (1995-09-01), Lee
patent: 5937114 (1999-08-01), Fisher et al.

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