Micro-moving device and its manufacturing method

Semiconductor device manufacturing: process – Including control responsive to sensed condition

Reexamination Certificate

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Details

C438S010000, C438S118000, C438S928000, C310S311000, C360S294400

Reexamination Certificate

active

07005304

ABSTRACT:
A micro-transfer device for fine positioning is employed typically in recording and playback apparatus for recording disks. Voltage is stably supplied to an expandable element which displaces the position of a recording head by applying voltage. An end different from one end connected to a base, where the recording head is mounted, is fixed to a fixing substrate for preventing changes in dimensions of the expandable element. An external electrode connection for supplying voltage to the expandable element is provided in an area on the fixing substrate.

REFERENCES:
patent: 6289564 (2001-09-01), Novotny
patent: 6532138 (2003-03-01), Koganezawa
patent: 6552878 (2003-04-01), Sato et al.
patent: 6597541 (2003-07-01), Nishida et al.
patent: 2001/0021086 (2001-09-01), Kuwajima et al.
patent: 2001/0038515 (2001-11-01), Koganezawa et al.
patent: 6-338673 (1994-12-01), None
patent: 2000-218783 (2000-08-01), None
patent: 2000-299510 (2000-10-01), None
patent: 2001-43641 (2001-02-01), None

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