Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate
2006-02-28
2006-02-28
Dang, Trung (Department: 2823)
Semiconductor device manufacturing: process
Including control responsive to sensed condition
C438S010000, C438S118000, C438S928000, C310S311000, C360S294400
Reexamination Certificate
active
07005304
ABSTRACT:
A micro-transfer device for fine positioning is employed typically in recording and playback apparatus for recording disks. Voltage is stably supplied to an expandable element which displaces the position of a recording head by applying voltage. An end different from one end connected to a base, where the recording head is mounted, is fixed to a fixing substrate for preventing changes in dimensions of the expandable element. An external electrode connection for supplying voltage to the expandable element is provided in an area on the fixing substrate.
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Miki Katsumasa
Morinaka Katsuya
Nakatani Masaya
Tajika Hirofumi
Dang Trung
Matsushita Electric - Industrial Co., Ltd.
Wenderoth , Lind & Ponack, L.L.P.
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