Micro movable mechanism system and control method for the same

Details Micro movable mechanism system and control method for the same Micro movable mechanism system and control method for the same

2006-08-08

2006-08-08

Tarcza, Thomas H. (Department: 3662)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S292000, C385S018000

Reexamination Certificate

active

07088492

ABSTRACT:
A micro movable mechanism system includes a micro movable mechanism. A target position generating section generates a signal indicative a target position of the micro movable mechanism. A nonlinear control unit outputs a controller output signal indicating a control value based on a difference between the target position signal and a signal indicating a current position of the micro movable mechanism. A root correction section drives the micro movable mechanism based on a signal proportional to a square root of the control value.

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