Micro movable element

Details Micro movable element Micro movable element

2011-03-08

2011-03-08

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

With particular mount or drive for element

Reexamination Certificate

active

07903313

ABSTRACT:
A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.

REFERENCES:
patent: 2006/0119216 (2006-06-01), Kouma et al.
patent: 2008/0042260 (2008-02-01), Jeong et al.
patent: 2008/0205021 (2008-08-01), Mizuno et al.
patent: 2009/0001487 (2009-01-01), Mizuno et al.
patent: 2003-019700 (2003-01-01), None
patent: 2004-341364 (2004-12-01), None
patent: 2006-072252 (2006-03-01), None
patent: 2006-162663 (2006-06-01), None
patent: 2007-286037 (2007-11-01), None
patent: 2008-207311 (2008-09-01), None
patent: 2009-016383 (2009-01-01), None
U.S. Appl. No. 12/249,677, filed Oct. 10, 2008; Corresponds to JP2007-286037, Foreign Patent No. 3.

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