Dynamic information storage or retrieval – Specific detail of information handling portion of system – Radiation beam modification of or by storage medium
Reexamination Certificate
2007-05-08
2007-05-08
Dinh, Tan (Department: 2627)
Dynamic information storage or retrieval
Specific detail of information handling portion of system
Radiation beam modification of or by storage medium
C369S044230, C369S044170, C359S876000
Reexamination Certificate
active
11114868
ABSTRACT:
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
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Hane Kazuhiro
Hara Masaki
Hori Kazuhito
Ido Hiroto
Kojima Naoto
Chu Kim-Kwok
Dinh Tan
Sonnenschein Nath & Rosenthal LLP
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