Dynamic information storage or retrieval – Specific detail of information handling portion of system – Radiation beam modification of or by storage medium
Reexamination Certificate
2005-07-05
2005-07-05
Dinh, Tan (Department: 2653)
Dynamic information storage or retrieval
Specific detail of information handling portion of system
Radiation beam modification of or by storage medium
C369S044230, C385S016000, C385S088000, C359S298000, C359S245000, C359S295000, C428S212000, C430S323000
Reexamination Certificate
active
06914871
ABSTRACT:
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
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Hane Kazuhiro
Hara Masaki
Hori Kazuhito
Ido Hiroto
Kojima Naoto
Chu Kim-Kwok
Dinh Tan
Sonnenschein Nath & Rosenthal LLP
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