Micro mirror device with adjacently suspended spring and...

Details Micro mirror device with adjacently suspended spring and... Micro mirror device with adjacently suspended spring and...

2006-02-14

2006-02-14

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S291000

Reexamination Certificate

active

06999228

ABSTRACT:
A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.

REFERENCES:
patent: 5579151 (1996-11-01), Cho
patent: 5631764 (1997-05-01), Chae
patent: 5646772 (1997-07-01), Yurke
patent: 5654819 (1997-08-01), Goossen et al.
patent: 5703728 (1997-12-01), Smith et al.
patent: 5745281 (1998-04-01), Yi et al.
patent: 5867202 (1999-02-01), Knipe et al.
patent: 5995071 (1999-11-01), Mertz
patent: 6147790 (2000-11-01), Meier et al.
patent: 6271955 (2001-08-01), Atobe et al.
patent: 6285490 (2001-09-01), Meier et al.

Affiliated with

Also associated with

Rating

Micro mirror device with adjacently suspended spring and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro mirror device with adjacently suspended spring and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro mirror device with adjacently suspended spring and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3701173