Micro mirror and method of manufacturing the same

Details Micro mirror and method of manufacturing the same Micro mirror and method of manufacturing the same

2007-03-20

2007-03-20

Wood, Kevin S. (Department: 2874)

Optical waveguides

Integrated optical circuit

C385S147000

Reexamination Certificate

active

11203375

ABSTRACT:
A micro mirror and a method of manufacturing the same are provided. The micro mirror includes a silicon substrate having a first slant plane and a second slant plane that face each other, and a clad layer including a first mirror surface and a second mirror surface respectively formed on the first slant plane and the second slant plane, wherein the clad layer reflects light.

REFERENCES:
patent: 2004/0240779 (2004-12-01), Yeh et al.
patent: 10-0351561 (2002-09-01), None
patent: 2003-0028398 (2003-04-01), None

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