Optical: systems and elements – Mirror – With support
Reexamination Certificate
2007-03-06
2007-03-06
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Mirror
With support
C359S291000, C359S290000
Reexamination Certificate
active
11000004
ABSTRACT:
A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
REFERENCES:
patent: 6817725 (2004-11-01), Mizuno et al.
patent: 6914711 (2005-07-01), Novotny et al.
patent: 7014115 (2006-03-01), Fu
patent: 2003/0019832 (2003-01-01), Conant et al.
patent: 4-343318 (1992-11-01), None
patent: 2003-172897 (2003-06-01), None
Cho Jin-woo
Ko Young-chul
Lee Jin-ho
Fang Jerry
Thompson Timothy
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