Radiant energy – Ionic separation or analysis – With evacuation or sealing means
Patent
1994-10-07
1995-11-14
Berman, Jack I.
Radiant energy
Ionic separation or analysis
With evacuation or sealing means
4174132, H01J 4924, F04B 1700
Patent
active
054669324
ABSTRACT:
A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.
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Freidhoff Carl B.
Polla Dennis L.
Schiller Peter J.
Young Robert M.
Berman Jack I.
Sutcliff Walter G.
Westinghouse Electric Corp.
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