Pumps – Motor driven – Electric or magnetic motor
Patent
1988-01-19
1990-03-27
Smith, Leonard E.
Pumps
Motor driven
Electric or magnetic motor
417410, F04B 1700
Patent
active
049116169
ABSTRACT:
A microminiature pump for use in the eye or other location in the human body. The pump is fabricated from crystalline silicon using semiconductor fabrication techniques such as impurity diffusion and anisotropic etching. The pump utilizes a thin, etched, diaphragm which is actuated with electromagnetic or electrostatic forces, to provide the pumping action. Diaphragm or ball check valves at the inlet and outlet are also fabricated with semiconductor materials and techniques.
REFERENCES:
patent: 3264998 (1966-08-01), Dingman
patent: 4514742 (1985-04-01), Suga et al.
patent: 4520375 (1985-05-01), Kroll
Jaeger Hugh D.
Smith Leonard E.
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