Optical: systems and elements – Light control by opaque element or medium movable in or... – With rotating or pivoting element
Patent
1993-10-29
1995-10-17
Dzierzynski, Paul M.
Optical: systems and elements
Light control by opaque element or medium movable in or...
With rotating or pivoting element
359230, 359559, 359561, 310 42, 310 905, 216 24, 216 39, G02B 2602, G02B 2746, H01L 4108
Patent
active
054596025
ABSTRACT:
A micro-optical shutter array (92, 102) having a number of tiny shutters (10), which revolve so as to intermittently block light from a via (12), and which may be operated in either a stepping or continuous motion. The array (92, 102) may be batch manufactured using integrated circuit fabrication techniques. For each shutter, a via (12) is etched through a substrate (11). A rotor (13, 43, 53, 63) with at least one opening is fabricated over the via (12), such that as the rotor (13, 43, 53, 63) turns, radiation transmitted through the via (12) is selectively blocked or not blocked.
REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5252881 (1993-10-01), Muller et al.
patent: 5327286 (1994-07-01), Sampsell et al.
Donaldson Richard L.
Dzierzynski Paul M.
Grossman Rene E.
Phan James
Reed Julie L.
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