Micro-mechanical device comprising a liquid chamber

Details Micro-mechanical device comprising a liquid chamber Micro-mechanical device comprising a liquid chamber

2000-05-23

2001-11-13

Barlow, John (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S054000

Reexamination Certificate

active

06315399

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates broadly to micro-mechanical devices comprising a liquid chamber and providing a seal around a moveable component located in part within the liquid chamber. The present invention will be described herein with reference to micro-mechanical devices for ink jet printers. However, it will be appreciated that the present invention does have broad applications, including in micro-mechanical pumps.
BACKGROUND OF THE INVENTION
Commercially constructed micro-mechanical systems typically utilise standard semiconductor fabrication processes, and as those processes become more and more refined, the field of applications for micro-mechanical devices increases.
Recently, micro-electro-mechanical system (MEMS) devices have been proposed to be utilised in ink jet printing and other devices which involve fluids.
In such devices, one of the challenges is to provide adequate sealing for liquid nozzles or liquid channels within the MEMS device, particularly where the seal is to be provided between moving parts.
SUMMARY OF THE INVENTION
In accordance with a first aspect of the present invention there is provided a micro-mechanical device comprising a liquid chamber and a movable component located in part within the chamber and extending in a first direction through an opening in a wall of the chamber, the component being movable within the opening in a second direction orthogonal to the first direction. The component comprises a body portion which is located within the opening and which has a width substantially equal to the width of the opening, a stem portion which extends outside of the opening and away from the wall and having a smaller width than the body portion and a shoulder connecting the stem portion to the body portion. The shoulder is aligned with an outside edge of the opening, whereby a liquid in the chamber forms a meniscus between the outside edge and the shoulder and the meniscus is maintained during movement of the component in the second direction.
The shoulder may be in the form of a step connecting the stem portion to the body portion.
In one embodiment, the wall comprises a planar portion in an outer surface of the wall adjacent the opening.
A preferred form of the invention will now be described, by way of example only, with reference to the accompanying drawings.


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