Wave transmission lines and networks – Plural channel systems – Having branched circuits
Patent
1990-11-01
1992-06-09
Gensler, Paul
Wave transmission lines and networks
Plural channel systems
Having branched circuits
333262, 200181, H01P 110
Patent
active
051210894
ABSTRACT:
A miniature electrostatically actuated switch and process for fabricating it in which the switch is operable to connect and disconnect one or more transmission lines laid down on a dielectric substrate of an integrated circuit wafer. The switch is fabricated on the integrated circuit wafer using integrated circuit fabrication processes including thin films of conductive materials and photoresist and selective removal of these films. the switch includes a rotating switch blade which rotates about a hub formed on the dielectric substrate under the influence of electrostatic fields created by control pads and other switch elements formed on the dielectric substrate, whereupon a microwave signal can be switchably transmitted along the transmission line formed on the substrate.
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Coble P. M.
Denson-Low W. K.
Gensler Paul
Hughes Aircraft Company
Leitereg E. E.
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