Micro-machined resonator oscillator

Details Micro-machined resonator oscillator Micro-machined resonator oscillator

1993-03-30

1994-08-16

Mis, David

Oscillators

With device responsive to external physical condition

331 66, 331 68, 331 74, 331108C, 331116R, 331116FE, 331158, 310318, 310319, 324652, 324727, 343718, 455 92, 455100, 455128, 455129, H03B 536, H01L 4108

Patent

active

053390512

ABSTRACT:
A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

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