Micro-hotplate devices and methods for their fabrication

Details Micro-hotplate devices and methods for their fabrication Micro-hotplate devices and methods for their fabrication

1992-10-26

1995-11-07

Jeffery, John A.

Electric heating

Heating devices

With heating unit structure

219543, 338307, 437918, 7320426, H05B 300, G01F 168, H01C 1012

Patent

active

054649668

ABSTRACT:
A design and fabrication methodology, for silicon micromachined micro-hotplates which are manufactured using commercial CMOS foundries techniques with additional post-fabrication processing. The micro-hotplates are adaptable for a host of applications. The methodology for the fabrication of the micro-hotplates is based on commercial CMOS compatible micromachining techniques. The novel aspects of the micro-hotplates are in the design, choice and layout of the materials layers, and the applications for the devices. The micro-hotplates have advantages over other similar devices in the manufacture by a standard CMOS process which include low-cost and easy integration of VLSI circuits for drive, communication, and control. The micro-hotplates can be easily incorporated into arrays of micro-hotplates each with individualized circuits for control and sensing for independent operation.

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